발행물

전체 논문

245

191

Experimental investigation on the floating potential of cylindricalLangmuir probes in non-Maxwellian electron distributions
정진욱
PHYSICS OF PLASMAS, 200512

192

Photoresist ashing in nitrogen gas using ferrite coreinductively coupled plasmas
정진욱, 0, 0, 0, 0, 0, 0, 0
VACUUM, 200510

193

Study of ashing for low-k dielectrics using the N2/O2 ferrite-coreinductively coupled plasmas
정진욱, 0, 0
THIN SOLID FILMS, 200509

194

Self-consistent global model with multi-step ionizations in inductively coupled plasma
정진욱, 0, 0
PHYSICS OF PLASMAS, 200507

195

Application of N2/Ar inductively coupled plasma to the photoresist ashing for low k dielectrics
정진욱, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0, 0
JOURNAL OF MATERIALS SCIENCE, 200507

196

Feature of electron energy distribution in a low pressure capacitive discharge
정진욱, 0, 0, 0
APPLIED PHYSICS LETTERS, 200507

197

Self-consistent global model with multi-step ionizations in inductively
10091406
Physics of Plasmas - 직접입력, 200507

198

characterization of pulsed plasma in unbalanced magnetron argon discharge
정진욱, 0, 0, 0, 0
PHYSICS OF PLASMAS, 200506

199

Characterization of pulsed plasma in unbalanced magnetron
10091406
Physics of Plasmas - 직접입력, 200506

200

유도 결합 플라즈마에서 터널 다이오우드 발진을 이용한 음의 바이어스 영역의 쉬스 정전 용량 측정 연구
정진욱, 0, 0
새물리, 200506