Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas

Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas

Electromagnetically Coupled Resonators Using Toroidal Ferrite Core for wireless power transfer

Effect of helium on spatial plasma parameters in low pressure argon-helium plasma

Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge

유도 결합 플라즈마에서 플라즈마 변수와 전자 에너지 분포에 대한 극판 전력 인가의 영향

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

Real-time observation of the capacitance variation in a surface dielectric layer in radio frequency discharge

Electrical test method using high density plasmas for high-end printed circuit boards

Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma