발행물

전체 논문

245

161

Improved measurement method for electron energy distribution functions with high accuracy and reliability
정진욱, 방진영, 김아람
PHYSICS OF PLASMAS, 201006

162

Transient effects caused by pulsed gas and liquid injections into low pressure plasmas
정진욱, D. Ogawa, M. Goeckner, L. Overzet
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201005

163

Floating harmonics method for measuring electron temperature in non-Maxwellian plasmas
정진욱, 방진영, 김아람
JOURNAL OF APPLIED PHYSICS, 201005

164

New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges
정진욱, 오세진, 장성호, 김영철
REVIEW OF SCIENTIFIC INSTRUMENTS, 201005

165

Measurement of the total energy losses per electron-ion lost in various mixed gas inductively coupled plasmas
정진욱, 구주환, 이영광
PHYSICS OF PLASMAS, 201004

166

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas
정진욱, 이민형, 이효창
PHYSICAL REVIEW E, 201004

167

Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma
정진욱, 이효창
THIN SOLID FILMS, 201004

168

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
정진욱, 이효창, 이정규
PHYSICS OF PLASMAS, 201003

169

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma
정진욱
APPLIED PHYSICS LETTERS, 201002

170

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasma
정진욱
APPLIED PHYSICS LETTERS, 201001