Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Control of plasma density distribution via wireless power transfer in an inductively coupled plasma

Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases

Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

Understanding the Synthesis of Ethylene Glycol Pulsed Plasma Discharges

Plasma Characteristics Depending on Power Feeding Method in an Inductively Coupled Plasma

Real time feedback control of plasma density using a floating probe in semiconductor processing

Comparisons of the electrical characteristics by impedance matching conditions on the E-H and H-E transition and the hysteresis of inductively coupled plasma

Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge

Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias