Measurements of the total energy lost per electron-ion pair lost in low-pressure inductive argon, helium, oxygen and nitrogen discharge

Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

Correlation between nanoparticle and plasma parameters with particle growth in dusty plasmas

Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy

Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films

A numerical method for determining highly precise electron energy distribution functions from Langmuir probe characteristics

Role of hydrogen in evolution of plasma parameters and dust growth in capacitively coupled dusty plasmas

Radio frequency-compensated Langmuir probe with auxiliary double probes

Experimental investigation of edge-to-center density ratio in inductively coupled plasmas

Measurement of electron temperature and ion density using the self-bias effect in plasmas