발행물

전체 논문

245

141

Measurement of the sheath capacitance of a planar probe
정진욱, 오세진, 이영광
PHYSICS OF PLASMAS, 201110

142

A plasma diagnostic technique using a floating probe for the dielectric deposition process
정진욱
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201109

143

Electron energy flux control using dual power in side-type inductively coupled plasma
정진욱, 0, 0
PHYSICS OF PLASMAS, 201107

144

Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy
정진욱, 이영광, 오세진, 문세연
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 201106

145

Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma
정진욱, 방진영
IEEE TRANSACTIONS ON PLASMA SCIENCE, 201105

146

E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas
정진욱, 이정규, 이효창
CURRENT APPLIED PHYSICS, 201104

147

Harmonic analysis of sideband signals generated in plasmas
정진욱, 장성호, 김건호
THIN SOLID FILMS, 201104

148

Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas
정진욱, 김영도, 김유신, 이효창, 방진영
PHYSICS OF PLASMAS, 201103

149

Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor
정진욱, 이효창, 김아람, 문세연
PHYSICS OF PLASMAS, 201102

150

Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures
정진욱, 오세진, 김영철
REVIEW OF SCIENTIFIC INSTRUMENTS, 201102