Measurement of the sheath capacitance of a planar probe
정진욱, 오세진, 이영광
PHYSICS OF PLASMAS, 201110
142
A plasma diagnostic technique using a floating probe for the dielectric deposition process
정진욱
PLASMA SOURCES SCIENCE & TECHNOLOGY, 201109
143
Electron energy flux control using dual power in side-type inductively coupled plasma
정진욱, 0, 0
PHYSICS OF PLASMAS, 201107
144
Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy
정진욱, 이영광, 오세진, 문세연
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 201106
145
Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma
정진욱, 방진영
IEEE TRANSACTIONS ON PLASMA SCIENCE, 201105
146
E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas
정진욱, 이정규, 이효창
CURRENT APPLIED PHYSICS, 201104
147
Harmonic analysis of sideband signals generated in plasmas
정진욱, 장성호, 김건호
THIN SOLID FILMS, 201104
148
Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas
정진욱, 김영도, 김유신, 이효창, 방진영
PHYSICS OF PLASMAS, 201103
149
Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor
정진욱, 이효창, 김아람, 문세연
PHYSICS OF PLASMAS, 201102
150
Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures