발행물
컨퍼런스
2010년도 한국재료학회 추계학술발표대회
2010
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Nano size의 CO2 gas cluster를 이용한 반도체 건식 세정에서 오염입자 제거와 미세 패턴 damage에 관한 연구
The 7th International surface preparation/cleaning workshop
New damage free nano gas cluster cleaning in vacuum
Particle and carbon contaminants control on Ru capped EUV mask in gas dissolved DI water
2010 International Symposium on Extreme Ultraviolet Lithography
Organic removal on EUVL Ru-capped Mo/Si multilayer by ozonated DI water(DIO3) to reduce surface damage
INTERNATIONAL SYMPOSIUM ON NATURE-INSPIRED TECNOLOGY 2010
Research on microfabrication of stainless steel for anti-biofouling