발행물
컨퍼런스
The 12th Cleaning Technology Symposium of Korea SCUGM
2010
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Investigation of ozonated water for ruthenium-capped EUV mask cleaning
10th International Symposium on ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES
Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window
International Union of Materials Research Societies International Conference on Electronic Materials
Development of Electroforming process for Nano-CoNi stamps from Si Mother Mold using Vapor Self Assembled Monolayer
Design of Hydrophilic/hydrophobic SAM (Self Assembled Monolayer) Structure for Selective and Highly Sensitive Bio Analysis
15th International Symposium on Chemical-Mechanical Planarization
Effect of CMP Consumables on Scratches Formation