발행물
컨퍼런스
SPCC 2009
2009
,
Its challenges and future
SEMATECH Surface Preparation and Cleaning Conference
2008
Collapse Behavior and Forces of Multi-stack Patterns
2008 Annual Summer KIEEME Conference
Formaion mechanism of scratches on ILD CMP
Thchnical Meeting of Korea CMP UGM
The Mechanism of Ru CMP in NalO4-based Slurry
2008 uTASS
DEVELOPMENT OF EMBEDDED METAL LINES IN A PLASTIC ELECTROCHEMICAL MICROFLUIDIC DEVICE BY BLANKET MOLD IMPRINTING