발행물
컨퍼런스
Fall Conference of KMRS
2006
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Development and evaluation of aluminum CMP slurry based on abrasives for next generation metal line fabrication
Development of PMMA Bonding Process for Disposable Microfluidic Chip
Process Optimization of Antistiction Layer by Vapor SAM
The simulation of X-ray detector controlled by guard-ring
Development of slurry for Ru Chemical Mechanical Planarization