발행물
컨퍼런스
The 72nd Annual Gaseous Electronics Conference
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Modified floating harmonic method by analyzing the harmonic currents of a DC blocking capacitor in a floating probe
Effect of capacitor termination to antenna coil on electron density distribution in an inductively coupled plasma
Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge
Improvement of power transfer efficiency in a capacitively coupled plasma
A method to measure the negative ion density distribution using a planar Langmuir probe in low- pressure oxygen plasmas