발행물
컨퍼런스
The 72nd Annual Gaseous Electronics Conference
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A plasma diagnostic method by applying square voltages to a floating probe for deposition plasmas
The effect of electron attachment and detachment on electron energy probability function in an inductive oxygen discharge
Characterization of an inductively coupled plasma(ICP) source for ion implantation process
Effect of N2 on decomposition of CO2 using a hybrid plasma source
On the E to H transition in a dual frequency inductively coupled plasma