,

Effect of inductance termination of the ground electrode in capacitively coupled plasmas

,

Interpretation of current decrease during E-H transition in a cylindrical inductively coupled plasma

,

플라즈마 변수들과 웨이퍼 표면 온도의 공간상 분포에 대한 상관관계

,

Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma

,

Effect of multi-step ionization on the tail electron temperature in an argon inductively coupled plasma