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Comparison of pressure dependence on electron temperature in a high density Ar/O2 inductively coupled plasma

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Effect of current ratio control onO radical generation in oxygen hybrid plasma

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Electrical characteristics and plasma parameters during E ? H mode transition in an inductively coupled plasma

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Effect of RF bias frequency and gas pressure on discharge mode transition in an inductively coupled plasma

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Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load