발행물
컨퍼런스
Wear of Materials 2013
2013
,
Evaluation of double sided lapping using fixed abrasive pad for sapphire substrates
제2회 차세대리소그래피 학술대회 / 2013 conference on Next Generation Lithography
듀얼 디퓨저 리소그래피를 이용한 복합 3D 구조의 제작
SEMATECH Surface Preparation and Cleaning Conference
Development of Non-Amine Based Post Cu CMP Cleaning Solution
2012년도 한국재료학회 추계학술발표 및 제 23회 신소재 심포지엄
2012
Development of One Step Transfer Method of Hydrophobic Surface on Polyester Fabric
The 51th Technical Meeting of Korea CMPUGM
Correlation of Polishing pad Property and Pad debris on Scratch Formation during CMP