발행물
컨퍼런스
The 25th International Microprocesses and Nanotechnology Conference (MNC 2012)
2012
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Development of Wafer-Level Fabrication Process for SiO2 based Nanowell Array Chip and Its Characterization
Development of Cleaning Process for UV cured Resin Removal on Quartz substrate for Nanoimprint Lithography
Advanced Metallization Conference 2012 ; 22nd Asian Session
Modification of Diamond Conditioner with V-SAM Coatings for Corrosion Prevention during Metal CMP
Hybrid Cleaning Technology for Enhanced Post-Cu/low-k CMP Cleaning Performance
The Impact of Diamond Conditioners on Scratch Formation during Silicon-dioxide CMP