발행물
컨퍼런스
11th International symposium on Ultra Clean Processing of Semiconductor Surfaces
2012
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Acoustic Cavitation Behavior in Surface Active Solute Added Cleaning Solution
Removal of UV cured resin using hybrid cleaning method
17th International Symposium on Chemical Mechanical Planarization
Etching and Polishing Behavior of Single and Polycrystalline Silicon in Alkaline Slurry
한국바이오칩학회 2012 춘계학술발표대회
Characterization of Nanoarray Biosensor made by Wafer-scale Fabrication Method for Highly Sensitive Electrochemical Analysis
2012년도 한국재료학회 춘계학술발표 및 제 22회 신소재 심포지엄
미세금형 가공을 위한 전기화학식각공정의 유한요소 해석 및 실험 결과 비교