발행물
컨퍼런스
2012년도 한국재료학회 춘계학술발표 및 제 22회 신소재 심포지엄
2012
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UV 나노임프린트 리소그래피의 Quartz 기판상의 Resin mold 제거를 위한 Hybrid 세정공정에 관한 연구
The 15th Cleaning Technology Symposium of Korea SCUGM
The Effect of Pulsative and Continuous Chemical Supply on Oxide Wet Etching and Cleaning
Research Issues for Surface Preparation from SPCC 2012
SEMATECH Surface Preparation and Cleaning Conference
Removal of UV cured resin mold on quartz using UV/O3 cleaning for Nanoimprinting Lithography
SEMICON China2012
CMP Defects: Their Detection and Analysis on Root Causes