발행물

논문
특허
저서
컨퍼런스

전체 논문

323

111

Optimization of DIO3 with Megasonic Cleaning of Ru Capped EUVL Mask for Effective Carbon Contaminant Removal
박진구, 이승호, 강봉균, 김민수, 임정수, 정지현
ECS Transactions, 2011

112

Citric Acid and NaIO(4) Based Alkaline Cleaning Solution for Particle Removal during Post-Ru CMP Cleaning
박진구, In-Kwon Kim, Y. Nagendra Prasad, Tae-Young Kwon, Hyuk-Min Kim, Ahmed A. Busnaina
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011

113

Hydrophobic Modification of Diamond Conditioner for Prevention of Particle Adhesion During Oxide CMP
박진구, In-Kwon Kim, Tae-Young Kwon, Dong-Chan Kim, Moon-Seak Park
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011

114

Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip
박진구, Dong-Jin Kim, Jung-Hwan Lee, Si-Hyeong Cho, Muhammad Rizwan, R. Prasanna Venkates, Bong-Guen
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011

115

A Self-Assembled Monolayer-Based Micropatterned Array for Controlling Cell Adhesion and Protein Adsorption
박진구, 김동진, 이종민, 정봉근
BIOTECHNOLOGY AND BIOENGINEERING, 2011

116

Random yield loss during wafer cleaning
박진구, R. Prasanna Venkates, 임정수
SOLID STATE TECHNOLOGY, 2011

117

Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning
박진구, 장덕숙, 김동식
JOURNAL OF APPLIED PHYSICS, 2011

118

Generation of Pad Debris during Oxide CMP Process and Its Role in Scratch Formation
박진구, Y. Nagendra Prasad, 권태영, 김인권
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2011

119

Effect of Rinse Process on Removal of Crown Type Defects during Photoresist Development
박진구
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011

120

플렉시블 스테인레스 스틸의 미세구조 제작과 표면 특성 연구
박진구, 이수민, 조시형, 이성호
대한기계학회 2010년도 추계학술대회, 2010