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전체 논문

323

101

텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가
박진구, 조병준, 권태영, 김혁민, Prasanna Venkatesh, 박문석
마이크로전자 및 패키징학회지(구 마이크전자 및 패키징학회지), 2012

102

CMP defects; their detection and analysis on root causes
박진구, Tae-Young Kwon, R. Prasanna Venkates, Byoung-Jun Cho
ECS transactions, 2012

103

Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography
박진구, Jung-Ki Lee, Si-Hyeong Cho, Muhammad Rizwan, Bong-Young Yoo
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012

104

A Multi Wavelength End-Point Detection System (EPD) for Next Generation Chemical Mechanical Planarization Process
박진구, 김혁민, 권태영, R.Prasanna Venkatesh, 김용태, 오찬권
2011 Internation Conference on Planarization/CMP Technology, 2011

105

Effect of Oxide Types on Defects in ILD CMP
박진구, 권태영, 김혁민, 조병준, 김용국, 홍창기
2011 Internation Conference on Planarization/CMP Technology, 2011

106

Blank Mask Fabrication by Chemical Mechanical Polishing of Quartz Substrate Based on Ceria Slurry for Lithography Process
박진구, 김혁민, 권태영, R.Prasanna Venkatech, 조병준
2011 Internation Conference on Planarization/CMP Technology, 2011

107

Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications
박진구, 조병준, 권태영, R. Prasanna Venkates, 김혁민, 박문석
2011 International Conference on Planarization/CMP Technology, 2011

108

Effect of Acoustic Cavitation on Dissolved Gases and Their Characterization During Megasonic Cleaning
박진구, 강봉균, 김민수, 이승호, 손홍성
ECS Transactions, 2011

109

Nano Gas Cluster Dry Cleaning for Damage Free Particle Removal
박진구, 김민수, 강봉균, 이승호, 최후미, 김호중, 윤덕주, 김태성
ECS Transactions, 2011

110

Effect of Pump Pulsation on Particle Contamination on Wafer Surface in Wet Cleaning System
박진구, 임정수, R. Prasanna Venkates
ECS Transactions, 2011