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컨퍼런스

전체 논문

323

91

Non Destructive Nanoparticle Removal from Submicron Structures Using Megasonic Cleaning
박진구
Diffusion and Defect Data Pt.B: Solid State Phenomena, 2013

92

Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process
박진구, R. Prasanna Venkates, Byoung Jun Cho, S. Ramanathan
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2012

93

Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask
박진구, Seung-ho Lee, Bong-kyun Kang, Min-su Kim, Jin-ho Ahn, Han-ku Cho, Han-shin Lee
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012

94

미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교
박진구, 류헌열, 임현승, 조시형, 황병준, 이성호
한국재료학회지, 2012

95

Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning
박진구, Tae Hoon Kim, Ahmed Busnaina, Dongsik Kim
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2012

96

Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing
박진구, Hyuk-Min Kim, R. Prasanna Venkates, Tae-Young Kwon
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2012

97

Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon
박진구, R. Prasanna Venkates, Y. Nagendra Prasad, Tae-Young Kwon, Young-Jae Kang
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012

98

The effect of pumping methods on wet etching processes
박진구, 임정수, R. PRASNNA BENKATESH
SOLID STATE TECHNOLOGY, 2012

99

Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window
박진구, Tae-Gon Kim, Antoine Pacco, Kurt Wostyn, Steven Berms, Herbert Struyf, Kai Arstila, B. Vandevelde, Stefan De Gendt, Paul W. Mertens, Marc Heyns
SOLID STATE PHENOMENA, 2012

100

Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay
박진구, Moon-Kwon Lee, Ki-Hyung Kim, Jung-Hwan Lee, Hyun-Woo Lim, Min-Yi Park, Soo-Ik Chang, Eun-Kyu Lee, Dong-Woo Lim, Jae-Bum Choo
BIOCHIP JOURNAL, 2012