Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node

Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution

Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography

Preparation of a high hydrophobic aluminium surface by double zincating process

Effect of Feature Spacing When Injection Molding Parts With Microstructured Surfaces

Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning

Fabrication of hydrophobic/hydrophilic switchable aluminum surface using poly(N-isopropylacrylamide)

Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process

Effect of pH and chemical mechanical planarization process conditions on the copper-benzotriazole complex formation

Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction