발행물

전체 논문

323

171

Effect of a guard-ring on the leakage current in a Si-PIN X-Ray detector for a single photon counting sensor
박진구
IEICE TRANSACTIONS ON ELECTRONICS, 2008

172

Effect of Sodium Periodate in Alumina-Based Slurry on Ru CMP for Metal.Insulator.Metal Capacitor
박진구
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008

173

Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing
박진구
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2008

174

The Effect of Hydrogen Peroxide in a Citric Acid Based Copper Slurry on Cu Polishing
박진구, 0, 0, 0
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007

175

Nanoparticle Scanning and detection on flat and structured surfaces using fluorescence microscopy
박진구, 0, 0, 0
MICROSCOPY RESEARCH AND TECHNIQUE, 2007

176

Chemical and Nanomechanical Characteristics of Fluorocarbon Thin Films Deposited by Using Plasma Enhanced Chemical Vapor Deposition
박진구, 0, 0, 0, 0
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007

177

Effect of Polish By-Products on Copper Chemical Mechanical Polishing Behavior
박진구, 0, 0, 0
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007

178

The Effect of Frictional and Adhesion Forces Attributed to Slurry Particles on the Surface Quality of Polished Copper
박진구, 0, 0, 0, 0
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007

179

The Deposition and Characterization Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer)
박진구, 0, 0, 0, 0, 0
한국재료학회지, 2007

180

Evaluation of Al CMP Slurry based on Abrasives for Next Generation Metal Line Fabrication
박진구, 차남구, 강영재, 김인권, 김규채
한국재료학회지, 2006