발행물

논문
특허
저서
컨퍼런스

전체 논문

323

121

Enhanced Fluorescence by Control of Surface Area on Plastic Bio-Chip
박진구, Dong-jin Kim, Jung-hwan Lee, Si-hyeong Cho
23th International Microprocesses and Nanotechnology Conference (MNC 2010), 2010

122

Effect of Self Assembled Monolayer (SAM) Precursors on Prevention of Slurry Residues on Conditioner
박진구, Dong-Chan Kim, In-Kwon Kim, Tae-Young Kwon, Hye-Young Son, J. Kim, Y.I. Choi, M.S. Park
2010 International Conference on Planarization/CMP Technology, 2010

123

Effect of Diamond Conditioner Design on Scratches During Oxide CMP
박진구, Hye-Young Son, Tae-Young Kwon, In-Kwon Kim, Dong-Chan Kim, J. Kim, Y.I. Choi, M.S. Park
2010 International Conference on Planarization/CMP Technology, 2010

124

Formulation of Alkaline Cleaning Solution for Post Cu-CMP Cleaning
박진구, Y. Nagendra Prasad, R.P. Venkatesh, Tae-Young Kwon
2010 International Conference on Planarization/CMP Technology, 2010

125

Study on Microfabrication and its Surface Characterization of Stainless Steel
박진구, Su-Min Lee, Si-Hyeong Cho, Sung-Ho Lee
THE 7 th INTERNATIONAL WORKSHOP ON MICROFACTORIES, 2010

126

The removal of nanoparticles from sub-micron trenches using megasonics
박진구, Pegah Karimi, Taehoon Kim, Juan Aceros, Ahmed A. Busnaina
MICROELECTRONIC ENGINEERING, 2010

127

Study on Ozonated DI water (DIO3) cleaning condition for organic contaminant removal with reduced surface damage to EUVL Ru-capping layer
박진구, Seung-ho Lee, Bong-kyun Kang, Hyuk-min Kim, Min-soo Kim, Han-ku Cho, Chan-uk Jeon, Hyung-ho Ko, Han-shin Lee, Jin-ho Ahn
SPIE Photomask Technology 2010, 2010

128

Fabrication and Characterization of a 32 x 32 Array Digital Si-PIN X-ray Detector for a Single Photon Counting Image Sensor
박진구, Jungho Seo, Jin-Young Kim, Hyun-Woo Lim, Songjun Lee, Bonghoe Kim, Sungchae Jeon, Young Huh
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2010

129

Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry
박진구, Young-Jae Kang, Y. Nagendra Prasad, In-Kwon Kim, Seok-Jo Jung
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2010

130

The Synergetic Role of Pores and Grooves of the Pad on the Scratch Formation during STI CMP
박진구, Jae-Gon Choi, Nagendra Prasad, In-Kwon Kim, Woo-Jin Kim
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010