발행물

논문
특허
저서
컨퍼런스

전체 논문

323

191

Metrology and Removal of Nanoparticles from 500 micron Deep Trenches
박진구, 0, 0, 0
SOLID STATE PHENOMENA, 2005

192

Laser Shock Removal of Nanoparticles from Si Capping Layer of Extreme Ultraviolet Lithography Masks
박진구, 0, 0, 0, 0, 0, 0, 0
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES &, 2005

193

Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
박진구, 0, 0, 0
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005

194

Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning
박진구, 0, 0, 0, 0, 0, 0, 0
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES &, 2005

195

Effect of Cerium Ammonium Nitrate and Alumina Abrasive Particles on Polishing Behavior in Ruthenium Chemical Mechanical Planarization
박진구, 0, 0, 0, 0
전기전자재료학회논문지, 2005

196

Fabrication of Hot Embossing Plastic Stamps for Microstructure
박진구, 0, 0, 0, 0, 0
한국재료학회지, 2005

197

Optimizing the Plasma Deposition Process Parameters of Antistiction Layers using a DOE(Design of Experiment
박진구, 0, 0, 0, 0, 0
한국재료학회지, 2005

198

Effects of Hydrogen Peroxide(H2O2) on Frictional and Thermal Characteristics during Cu CMP
박진구
Proceeding of CMP-MIC, 2005

199

The adhesion of abrasive particle and organic residues during STI and Poly-silicon CMP
박진구
PacRim-CMP 2005, 2005

200

Experimental and Modeling Study of Submicron Particle Removal from Deep Trenches
박진구
Proceeding of CMP-MIC, 2005