발행물
컨퍼런스
2019년도 한국재료학회 춘계학술대회
2019
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Co CMP를 위한 Co-BTA Complex Layer 특성 연구
A Novel Method to Evaluate the Catalyst Effect on the Performance of W CMP Process
THE SURFACE PREPARATION AND CLEANING CONFERENCE 2019 (SPCC)
Chemically controlled Megasonic Cleaning Technology for higher PRE and lower pattern damage
Hybrid DHF and N2 Jet Spray Cleaning for Silicon Nitride and Metal Layer
Removal of Nano Particles on the Hard Mask Wafer Backside using Brush Cleaning