발행물
컨퍼런스
10th International symposium on Electrochemical Machining Technology
2014
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Through Mask Electrochemical Micromachining of Stainless Steel for Stencil Fabrication
The 57th Technical Meeting of Korea CMPUGM
Challenges in 1x Design Node Semiconductor Device Cleaning
Characterization of Cu-BTA organic complexes on Cu during Cu CMP and post Cu CMP cleaning
Symposium on Semiconductor and Display 2014 (SSD 2014)
1x급 반도체 소자를 위한 세정기술 동향
40th International Conference on Micro and Nano Engineering
Dual Diffuser Lithography (DDL) to Fabricate Electrowetting Submicron Lens Arrays with Various Curvatures for Optofluidic Devices