2013

,

Development of Non-Amine-based Cleaning Solution for Post-Cu CMP Application

2013

,

The Evaluation of Ceria Slurry for Blank Mask Polishing for Photo-lithography Process

2013

,

Characterization of Sapphire Lapping Process Using Cu-resin Platen with Diamond Slurry

2013

,

Effects of Sodium Hexamethaphosphate (SHP) on the Ceria Abrasive Particle Dispersion for Quartz CMP

2013

,

Quantitative Control of Cavitation Intensity by Change of Acoustic Bubble Growth Rate