발행물
컨퍼런스
40th International Conference on Micro and Nano Engineering
2014
,
Preparation of Antibacterial and Super-Hydrophobic Aluminium Surface by Double Zincating
12th International symposium on Ultra Clean Processing of Semiconductor Surfaces
Characterization of Cu-BTA organic complexs on Cu during Cu CMP and post Cu CMP cleaning
Effect of FOUP atmosphere control on process wafer integrity in sub20nm device fabrication
19th International Symposium on Chemical-Mechanical Planarization
BTA Complex Layer in Cu CMP
2014년도 한국재료학회 춘계학술대회 및 제26회 신소재 심포지엄
메가소닉 세정공정에서 세정공정에서 세정액 내 첨가 가스의 특성이 미세오염입자 제거효율에 미치는 영향