발행물
컨퍼런스
SEMATECH Surface Preparation and Cleaning Conference
2014
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Demonstration of transition mechanism of cavitation intensity in gas dissolved waters based on acoustic bubble growth theory
2014년 한국청정기술학회 춘계 학술발표회
반도체 리소그래피 마스크 세정공정
제21회 한국반도체학술대회 The 21st Korean Conference on Semiconductors(KCS 2014)
Plasma Enhanced Chemical Vapor Deposition of Amine Layer on Polycarbonate
Development of Post-CMP Cleaning Solution for Interconnect Application
2013 Materials Research Society Fall Meeting
2013
Fabrication of Superhydrophobic Stainless Steel Surface with Hierarchical Structure