발행물
컨퍼런스
Spring Conference of KMRS
2006
,
The Adhesion Force of Abrasive Particles during STI, Poly-Si CMP
Study of Adhesion and Capillary Force between the Particles and Wafer Surface during the Laser Shock Wave Cleaning
Manufacture and Characterization of Electrochemical Polisher
Fabrication and Characterization of Imprinting Multi-step Stamp using Ni-electroplating
Spring Conference of KSTP
Preparation of Antistiction Coatings for Nanoimprinting