발행물
컨퍼런스
Spring Conference of KIEEME
2006
,
Effects of the Addition of Corrosion Inhibitor(BTA) in Slurry on Cu CMP
2006 Spring Conference of KIEEME
Development of Scratch-Free Plastic CMP Process for Transparent Display
The 8th Korean MEMS Conference
Fabrication of Metal Lines on a Plastic Substrate without Organic Solvents for Plastic Display
Characterization of Antistiction Layer for NIL(nanoimprint lithography) by a Friction Force Measurement
NNT 2005
2005
Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology