발행물
컨퍼런스
Proceeding of the KIEEME Annual Summer Conference
2006
,
The Characterization of the Conditioner Disks with Various Diamond Shapes
Tenth International Symposium on Particles on Surfaces, Detection, Adhesion and Removal
The Effect of Chemicals on Adhesion and Removal during Cu CMP
spring Conference of KMRS
The Study of Particle Cleaning Efficiency on High Dissolved Ozone in Alkaline Solution
Spring Conference of KMRS
Effect of Diamond Shapes of CMP conditioner on Polishing Behavior
Development of New Tungsten CMP Slurry using Colloidal Silica