2017

,

Development of Post InGaAs CMP Cleaning Process for sub 10nm Device Application

2017

,

Optimization of WC-Co Composition for CVD Diamond Pad Conditioner

2017

,

Chemical Generation Mechanism of Copper Flake Defects on Copper Wafer Surface from CMP Slurry and Post CMP Cleaning Chemistry

2017

,

Optimization of Cu Corrosion Inhibitor Concentration to Reduce Organic Defects

2017

,

Evaluation of Competitive Reaction of Various Cu CMP Slurry Components