발행물
컨퍼런스
International Union of Materials Research Societies ? International Conference on Electronic Materials 2018 (IUMRS-ICEM 2018)
2018
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Development of New Analysis Method with Ultrasonication for Incoming PVA Brush in Post-CMP Cleaning Process
MBTA as a corrosion inhibitor to reduce defects in Cu CMP
22nd International Symposium on Chemical-Mechanical Planarization
PVA brushes; its characteristics and effect on post CMP cleaning
SPCC 2018
Acidic Cleaning Solutions for Post InGaAs CMP Cleaning
Characterization of incoming PVA brush for 10 nm below post CMP cleaning process