발행물
컨퍼런스
2004 AVS 5th International Conference on Microelectronics and Interfaces
2004
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Evaluation of Pattern Dependent Copper Recess in Cu CMP
2003 한국재료학회 추계학술발표대회
2003
Characterization of Fluorocarbon Films grown by ICP
2003년도 한국재료학회 추계학술발표대회
Effect of Polymer Substrates on Nano Scale Hot Embossing
2003년도 대한기계학회 추계 학술대회
oxide CMP 과정에 대한 수치 유동 해석
1st Annual Symposium of the Korean Society of Microsystem on Life Science and Chemistry
Soft Lithograpy for Bio-MEMS Application