발행물
컨퍼런스
The92nd National Meeting of the Korean Chemical Society
2003
,
Formation of Anti-stiction Organic Monolayers on Silicon Substrate Using Self-Assembled Monolayer (SAM) and Chemical Vapor Deposition (CVD) Methods
2nd International Surface Cleaning Workshop
post CMP cleaning
2nd International Extreme UltraViolet Symposium
Damage Free and Dry Removal of Nano-size Inorganic and Organic Particles from EUV Mask Laters by Laser Induced Shockwaves
21th Korea chemical mechanical planarization users group meeting
Novel method to evaluate post Cu CMP cleaning solutions
The 1st New England International Nanomanufacturing Workshop
Manufacturable Surface Modification of Micro/Nano Electro Mechanical System