발행물
컨퍼런스
2003년도 한국재료학회 춘계학술발표강연
2003
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Anti-adhesion and Nanomechanical Characteristics of Fluorocarbon Films for Nanoscale Device Fabrication
14th Semiconductor Manufacturing Conference and Workshop(ASMC)
Laser Shock Cleaning of Inorganic Micro and Nanoscale Particles
4th International Conference on Microelectronics and Interfaces
Removal of Submicron Particles Using Laser Shock Cleaning
Proceeding of 4th Inernatinal Conference on Microelectronics and Interfaces
The Adhesion and Removal of Silica Particles on Cu, TEOS, SiLK and TaN for Post-CMP Processes
The Adhesion-induced Deformation of Micro and Nanoscale Particles