2003

,

Adhension and Nanomechanical Characteristics of PECVD Fluorocarbon Thin Films

2003

,

Removal effect of particles from water with plasma position during laser shock cleaning process

2003

,

Particle Removal Effect and Drying of Si wafer surface in IPA and DI water mixing solution

2003

,

Chemical Mechanical characterizations of surface reaction during Cu CMP

2003

,

Characterization of anti-sticking self-assembled monolayer used for nano imprinting