발행물
컨퍼런스
한국재료학회 추계 학술대회
2000
,
The characterization of Reused oxide CMP slurry
The Electrochemical Society Fall Symposium
Characterization of Reused oxide Slurry
한국재료학회 춘계 학술대회
Inhibition of Slurry Particles Contamination During CMP using Orgainc acid
Characterization of Perfluoropolymer thin Films Grown by Pulsed PECVD
Internatinal conference on metallurgical coatings and thin films
Chemical, optical and tribological characterization of perfluoropolymer films as an snti-stiction layer in micromirror arrays