Effect of Chemical and Slurry Particles on Chemical Mechnical Poilishing of Polyimide

" Effect of Chemicals and Slurry Particles on CMP of Polyimide

접촉각 측정을 통한 불화 유기박막의 특성평가

Optical properties of fluorocarbon thin film on aluminum top layer in micromirror arrays

The vapor phase deposition of fluoro-carbon films for the prevention of in-usestiction in micromirror

Preparation and characterization of per-fluoro-organic films on aluminum

초순수내에서의 오존의 용해도와 세정 효과

The Change Wettabiity on Silicon Wafers by the H₂O₂in Semiconductor Cleaning Chemicals

The Behavior of Ozone in Dilute Acidic Solutions and its Reaction with Si Wafers

CMP of Polyimide as KLD Layer